Use of Residual Gas Analysers (RGA)

Technologie du vide
MS118 - 11 hours


Interpreting RGA readings incorporating the vacuum environment.
Verifying partial pressure within the chamber
Interpreting gasses being monitored by the RGA within the chamber
Be familiar with the use of RGA technology
Analyse the results
Practice RGA level 1 maintenance

The main goal of the training is to educate the trainees to use RGA to obtain readable spectrums and results.
It’s also possible to adapt targeted skills at the functions of the trainees (operators, technicians, managers and engineers); contact us to analyse your needs and the level of each group.



RGA users.
Maintenance staff



Lectures and «hands on» exercises.
Custom training manual.
Prior interview with the trainees possible in order to qualify their needs.
Altering lectures and " hands-on ", exercises and demonstrations.
Material: one pumping system with turbo molecular pump dedicated to provide enough level of vacuum for RGA’s analysis 2 analysers RGA’s comparable to existing on site; 2 computers equipped with software
1 Helium Test leak: to simulate leak.
Custom training manual. Multiple choice questions at the start and end of the training.
Training centres integrated with 40-30 workshops.
Maximum 4 persons per group.


PRICE per person

Please, contact us.



Training Department : +33(0)4 76 84 40 30



Michel THIAM: PhD in Physics (Strong Experience in Surface Physics and Surface Chemistry under UHV Conditions), from 40-30 Engineering Department.



1.The first part – Theory
What is theoretically an RGA: Definitions
Physic and General Theory- terms, vocabulary
RGA and Mass spectrometer inside
Formulas – Calculations
Why and When to use an RGA Mass Spectrometer

2.The second part – Practice
Analogue mode analysis and usages
Bar mode analysis and usages
Selected peak mode analysis and usage
Leak check mode and leaks simulation
Recipes creations and Recipes exercises
Calibrations modes and controls; sensitivity, mass centre, resolution, material factors
Sensor and RGA Transpector2 Maintenance: care, caution, practices, spares

3. Questions and Answers - Wrap up
Each trainee will be invited to bring and report his queries and difficulties met among training
Evaluation questionnaire
Correction and explanation following answering to questionnaire in your premises or in one of our training centres.