Residual gas analysis and mass spectrometry

Technologie du vide
MS117 - 21 hours


To understand outgassing, to become familiar with mass spectroscopy, and especially with a residual gas analyser (RGA).
To acquire the knowledge of the limits of how to use a RGA
To learn how to analyse spectra in mass spectroscopy.



Technicians and engineers who use a residual gas analyser and who want to acquire an understanding of the phenomenon under vacuum, depending on time and/or temperature, the limits of the use of a RGA and spectrum analysis.



Lectures and «hands on» exercises
. Custom training manual.
Prior interview with the trainees possible in order to qualify their needs.
Multiple choice questions at the start and end of the training.
Training centres integrated with 40-30 workshops.
Maximum 6 persons per group.


PRICE per person

Please, contact us.



Training Department : +33(0)4 76 84 40 30

Can be also held in your premises for a specific training.

We need 3 registrations to open a session.



Michel THIAM:PhD in Physics (Strong Experience in Surface Physics and Surface Chemistry under UHV Conditions), from 40-30 Engineering Department.



1- Outgassing
- Definition
- Physical chemistry phenomenon linked to outgassing
- Outgassing effects
- Thermal outgassing
- Non baked metallic materials
- Baked metallic materials
- Non-metallic materials (Elastomers, ceramics…)
- Outgassing Induced

2. Mass spectroscopy
- Theory
- Different kinds of mass spectroscopy
- Principle of a residual gas analyser (RGA):
- Functional units
- Spectrum interpretation
- Baking of a RGA: Care
- Existing equipment and their comparison
- Limits of the use of a RGA

3. Applications
-Organic contamination
-Spectrum analysis
-Temperature Programmed Desorption (TPD)

This training can be customised according to your work situations as well as the initial skills of the participants