Maintenance methodology on complex equipment: troubleshooting

MS131  - 75 hours

TRAINING OBJECTIVES

The objectives will be selected as requested.

Assimilate the architecture of an etching or deposition equipment by plasma technology, in order to become familiar with the lines of research of failures.

Know the specific design and terminology of plasma technology.

Master interactions between different flows (energy, RF source, vacuum management, gas…) to establish faster a diagnosis and localize the defective subas-sembly.

Integrate the failure modes of the subassembly to ensure a high level of availability and establish a plan for preventive maintenance integrating lists of spare parts.

Understand the physical causes (thermal, mechanical, humidity, vacuum system…) and their involvement in the deterioration of subassemblies by integrating the technological choices of constructors.

Understand clearly the indicators of the machine (For-ward, Reverse, DC Bias, Load, Tune…) which are the database for establishing diagnosis methods.

Confirm the defective element with simple actions on equipment such as changing control mode.

Implement effectively the specific metrology ( RF, vide…) when it’s necessary to confirm a failure.

Implement the RF metrology in functional status of the machine.

Isolate a subassembly to test and validate it.

Analyse the security risks on this type of equipment.

 

INNOVATIVE TEACHING RESOURCES

Transfer of know-how of 40-30: over 25 years of experience of maintenance and repair in the field of vacuum, electronics, RF, and regulatory tools in related to these technologies.

4 trainers, specialists in their field, work together during the training.

The pedagogy transfers not only practical skills but also implicit knowledge (knack, ability to act…)

50% of the time will be devoted to practical work and application exercises.

Etching equipment P5000 or LAM RIE

Helium leak detector, MFC, manometer, katharometer, piece to be tested, reference leaks…

Camera and temperature sensor

Current clamps

Oscilloscope and differential probes

Generator RF, tuner; Probes RF Z’Scan

Charge, Wattmètres RF Bird and IMPEDANS

Small demonstration tools, multiple choice questions at the beginning and end of training.

WHO WILL BENEFIT MOST

Maintenance technicians and engineers

 

IN CHARGE OF THE TRAINING SESSION

André TINNIRELLO : in charge of activities of gas and valve mass flowmeters maintenance.

Adrien SANCHIS: in charge of activities of leak detectors maintenance and RGA.

Jean-Luc LEPLOMB: maintenance engineer with 20 years of experience of project coordination and maintenance on semiconductor equipment.

Manuel LEBE: From 40-30 Engineering Department, who has developed the RF activity since 2001.

 

PRICE PER PERSON

2400 € ex.VAT in Grenoble area (France)
The price is without the examination; please contact us.

 

DATES & LOCATION

Training Department : +33(0)4 76 84 40 30

In your premises or in one of our training centers.

 

PROGRAM

PLEASE CONTACT US FOR THE PROGRAM