Troubleshooting on complex instrument: focus on the electric part

MS314  - 35 hours


To understand how failures occur in complex equipment.
To understand troubleshooting and the basic electronic circuits often observed on Plasma coating and etching (PECVD) equipment.
To analyse the failures linked to the RF, gas pressure, gas flow, energy transfer under strong RF, cooling system, in a methodological way, by introducing the concepts of failure rates.
Maintenance preventive scheme taking account of wear and weakness of pieces

The trainee will be able to elaborate a simplified scheme, extract a flow cast and find out the faulty subset.



Maintenance staff involved in PECVD.



50 % of the training time will be devoted to applied hands-on learning and analysis of situations the trainee has al-ready faced.
The training supports are constituted of Plasma coating and etching equipment (PECVD) and of Plasma demonstrators. This kind of training helps shining a light on complex equipment.
The trainee will experience a real troubleshooting hands-on training on equipment.
In the preparation phase, a complete pre-audit by phone will be done with the trainee in order to identify the trainee’s needs and the duration of the training.



Training Department : +33(0)4 76 84 40 30

Can be also held in your premises for a specific training



Please, contact us.
Each session is limited to 6 trainees



Manuel LEBE:from the Engineering Department of 40-30, has set up the Industrial Radiofrequency B.U in 40-30, since 2001.


Security aspects, personal protective equipment (PPE) and machinery. Intervention rules when the appliance is live and risks associated with radiofrequency equipment.

A review of the different parameters often used in Power electricity, electronics and radiofrequency.

A classical model approach of interfaces and electronic schemas.

An understanding of electronics through biases and currents usually found at typical interfaces: Power, analogic, logic, digital, optic, security loop, related norms.

A description of typical interfaces by types of subsets.

Hands-on diagram analysis and the approach of basic circuit diagrams used in logic, analogy and digital electronics,

Methods of troubleshooting applied to a complex circuit derived from the investigated device.

Troubleshooting hands-on training on the trainee’s experimental device and application of the Ishikawa’s methodical technique.

Procedures for RF metrology equipment, dedicated to each type of flux: RF Wattmeter, Current clamp, Oscilloscope, etc.

An approach through physics of the common electromagnetic problems in RF and the choice of procedures adapted to the dedicated probes. The role played by ground shielding in energy transfer.

Consolidation of the skills acquired during the first 4 days

Exercise: Live troubleshooting on the different parts during the training session.