RF-Plasma interaction

MS313  - 14 hours

Learning objectives

Understand how plasma (physical chemistry parameters) and RF energy source (hardware) interact with one another.
Adjust process parameters according to the equip-ment tolerance.
By the end of the training, participants will create or correct recipes with the understanding of their limits thresholds within the RF network.

 

Who will benefit most ?

Process and maintenance staff.

 

Innovative teaching resources

This course was developed to bring together process and maintenance staff to understand RF related issues in order to allow these teams to discuss this subject in a forum.
Lectures and «hands-on» exercises.
Custom training manual.
Prior interview with the trainees possible in order to qualify their needs.
Multiple choice questions at the start and end of the training.

 

Price per person

1250 € ex.VAT
1050 € ex.VAT from two people registered on the same session.
Each session is limited to 6 trainees.

 

Dates & location

Training Department : +33(0)4 76 84 40 30

Can be also held in your premises for a specific training

 

In charge of the training session

Manuel LEBE From 40-30 Engineering Department, who has developed the RF activity since 2001.

Program

Introduction: why this aspect “interaction” is important

1. Prerequisites
Reminder of the different dimensions in electronics that are essential for the remainder of the course.

2. RF environment and constraints
RF losses root causes and impact on Energy transferred to the process.

3. Plasma environment and constraints
Interactions of PIDs and RF regulation loops on the plasma behavior and stability.
How to get closer to the process using the tool sensors and the monitoring of plasma parameters.

4. Impedance adaptation
Theoretical module which covers the issues of energy transfer in Radiofrequency, the concept of reflected power, and the use of the Smith chart.

5. RF Match
The key to energy transfer, detailed view of the different models and design choices.
Implementation of energy transfer issues for high RF currents, etc.

6. RF generator
Detailed analysis of the components of an RF generator.
Fault analysis.
Specification analysis.

7. RF Cables
Theory, issues, cable choice, power resistance and cut-off frequency.

8. Metrology and diagnosis
Highlighting of the effects and limitations due to high frequency currents and materials.

9. RF microwave generator
Cavity magnetron preventive maintenance

10. Metrology and diagnosis