Safety measures in maintenance operations on thin films deposition chambers

MS513 – 14 HOURS

Training objectives and targeted skills

Understanding the risk linked to each subset of the chamber

Learning the good practise to adopt in workplace being in explosion risk zone

Evaluating the risks for promoting safe intervention for staff and the production tool

Setting up an adapted prevention scheme: precaution to take

Keeping events under control: from preparation to the end of intervention



Maintenance engineers and Senior staff.


Alternating seminars with hands-on exercises. Our training instructor will be available to make an analysis of situations encountered by the staff. Plasma etching and deposition equipment will be used.

Program Program
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